华南师范大学半导体科学技术研究院 » Laboratory »

    Institute of optoelectronic materials and technology with optoelectronic materials and devices research and development of ultra-clean room, the laboratory is currently mainly GaN-based nanowire devices, UV LED, OLED, quantum dot light, ZnO nanowires, perovskite solar cells and other research direction. Clean room laboratory equipment, including growth equipment, observation equipment, test equipment, cleaning equipment, etc., on behalf of the equipment as follows:

1、PECVD ( Plasma Enhanced Chemical Vapor Deposition )   

2、OLED450b high vacuum multi source evaporation deposition system 

3、Dm2500m Material Microscope

4、Chip Integrated Tester

5、Xp-2 type step instrument 

6、KDY-1 four-probe resistivity / resistance test instrument

7、CROWNTCCH

8、MOCVD Thomas Swan

9、Electric blast oven

10、Vacuum atmosphere tube furnace

11、Multifunctional microwave plasma experimental device

12、Ultraviolet spectrophotometer

13、Deionized water equipment

14、Lithography

15、Electron beam evaporator 

16、Ultrasonic wire bonder

17、High vacuum resistance evaporation coating machine ZHD400